Chemical Mechanical Polishing /Fundamentals and Challenges: Symposium Held April 5-7, 1999, San Francisco, California, U.S.A (Materials Research Society Symposium Proceedings)
Binding: Hardcover Publisher: Materials Research Society ISBN: 1558994734 ISBN-13: 9781558994737 Released: 12 Mar 2000 RRP: £39.10
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